Szczegóły publikacji

Opis bibliograficzny

Focused electron beam-induced deposition and post-growth purification using the heteroleptic Ru complex $(\eta^3-C_3H_5)Ru(CO)_3Br$ / Jakub JURCZYK, Christopher R. Brewer, Olivia M. Hawkins, Mikhail N. Polyakov, Czesław KAPUSTA, Lisa McElwee-White, Ivo Utke // ACS Applied Materials & Interfaces ; ISSN 1944-8244. — 2019 — vol. 11 iss. 31, s. 28164–28171. — Bibliogr. s. 28169–28171, Abstr. — J. Jurczyk - dod. afiliacja: Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland

Autorzy (7)

Słowa kluczowe

focused electron beam induced depositionprecursor compoundspost growth purificationrutheniummask repair

Dane bibliometryczne

ID BaDAP125523
Data dodania do BaDAP2020-01-16
Tekst źródłowyURL
DOI10.1021/acsami.9b07634
Rok publikacji2019
Typ publikacjiartykuł w czasopiśmie
Otwarty dostęptak
Czasopismo/seriaACS Applied Materials & Interfaces

Abstract

Focused electron beam-induced deposition using the heteroleptic complex (eta(3)-C3H5)Ru(CO)(3)Br as a precursor resulted in deposition of material with Ru content of 23 at. %. Transmission electron microscopy images indicated a nanogranular structure of pure Ru nanocrystals, embedded into a matrix containing carbon, oxygen, and bromine. The deposits were purified by annealing in a reactive 98% N-2/2% H-2 atmosphere at 300 degrees C, resulting in a reduction of contaminants and an increase of the Ru content to 83 at. %. Although a significant volume loss of 79% was found, the shrinkage was observed mostly for vertical thickness (around 75%). The lateral dimensions decreased much less significantly (around 9%). Deposition results, in conjunction with previous gasphase and condensed-phase surface studies on the electron-induced reactions of (eta(3)-C3H5)Ru(CO)(3)Br, provide insights into the behavior of allyl, carbonyl, and bromide ligands under identical electron beam irradiation.

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