Szczegóły publikacji

Opis bibliograficzny

Multiphase $CuO_{z}-CeO_{2-\delta}$ thin films by pulsed laser deposition technique: experimental texture evolutions and kinetics modeling / Magdalena KLIMCZAK-CHMIELOWSKA, Radosław CHMIELOWSKI, Agnieszka KOPIA, Jan KUSIŃSKI, Sylvie Villain, Christine Leroux, Jean-Raymond Gavarri // Thin Solid Films ; ISSN  0040-6090 . — 2004 — vol. 458 iss. 1–2, s. 98–107. — Bibliogr. s. 107, Abstr.

Autorzy (7)

Słowa kluczowe

pulsed laser depositioncopper doped cerium dioxidetexture modellingthin films

Dane bibliometryczne

ID BaDAP17181
Data dodania do BaDAP2004-09-01
Tekst źródłowyURL
DOI10.1016/j.tsf.2003.11.312
Rok publikacji2004
Typ publikacjiartykuł w czasopiśmie
Otwarty dostęptak
Czasopismo/seriaThin Solid Films

Abstract

CeO2 thin films for gas sensors doped with Cu were elaborated by pulsed-laser deposition (PLD) technique from Cu-CeO2 targets. The films were deposited on oriented Si substrates for various deposition times. Scanning electron microscopy analyses evidenced correlations between crystalline texture of thin films, copper atom fractions and deposition times. A statistical study of grain sizes and texture allows evaluation of growth rates. From X-ray diffraction analyses, it was clearly established that texture effects are continuously modified as the Cu atom fraction increases: preferred (111) orientations of CeO2 crystals change into (200) orientations. Such morphological effects might be involved by the presence of a CuOz phase, formed during the condensation process and peculiarly associated with the laser deposition technique. A texture parameter R corresponding to the volume ratio of oriented phases is defined. A first modeling of this texture parameter as a function of Cu composition x and deposition time t is proposed. (C) 2003 Elsevier B.V. All rights reserved.

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