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$CuO$ and $CuO/TiO_{2-y}$ thin-film gas sensors of $H_{2}$ and $NO_{2}$ / Artur RYDOSZ, Wojciech MAZIARZ, Andrzej BRUDNIK, Adam Czapla, Katarzyna ZAKRZEWSKA // W: COE 2018 [Dokument elektroniczny] : 15th international scientific conference on Optoelectronic and Electronic Sensors : 17–20 June 2018, Warsaw / Warsaw University of Technology. — Wersja do Windows. — Dane tekstowe. — [Piscataway : IEEE], [2018]. — e-ISBN: 978-1-5386-4107-1. — S. 1–4. — Wymagania systemowe: Adobe Reader. — Bibliogr. s. 4, Abstr. — Toż. na dysku flash
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Dane bibliometryczne
| ID BaDAP | 115775 |
|---|---|
| Data dodania do BaDAP | 2018-09-12 |
| Tekst źródłowy | URL |
| DOI | 10.1109/COE.2018.8435156 |
| Rok publikacji | 2018 |
| Typ publikacji | materiały konferencyjne (aut.) |
| Otwarty dostęp | |
| Wydawca | Institute of Electrical and Electronics Engineers (IEEE) |
| Konferencja | 15th international scientific conference on Optical and Electronic Sensors |
Abstract
Thin films of CuO and CuO/TiO2 were deposited by medium frequency magnetron sputtering on a variety of substrates for the purposes of gas sensing applications. Film characterization was performed by means of X-ray diffraction, XRD, scanning electron microscopy, SEM, and optical spectrophotometry. Gas sensing measurements were carried out in NO2 and H2 atmosphere at constant temperature chosen within the range of 200–400°C. Improvement in sensor response has been observed for CuO/TiO2 thin film heterostructures.