Szczegóły publikacji
Opis bibliograficzny
Metal oxide nanostructures for gas detection / Wojciech MAZIARZ, Tadeusz PISARKIEWICZ, Artur RYDOSZ, Kinga Wysocka, Grzegorz CZYRNEK // W: Electron Technology Conference 2013 : Ryn, Poland, 16–20 April, 2013 / eds. Paweł Szczepański, Ryszard Kisiel, Ryszard S. Romaniuk. — [Bellingham] : SPIE, cop. 2013. — (Proceedings of SPIE / The International Society for Optical Engineering ; ISSN 0277-786X ; vol. 8902). — ISBN: 9780819495211. — S. 890226-1–890226-8. — Bibliogr. s. 890226-7–890226-8, Abstr.
Autorzy (5)
Słowa kluczowe
Dane bibliometryczne
| ID BaDAP | 77133 |
|---|---|
| Data dodania do BaDAP | 2013-10-25 |
| DOI | 10.1117/12.2030298 |
| Rok publikacji | 2013 |
| Typ publikacji | materiały konferencyjne (aut.) |
| Otwarty dostęp |  |
| Konferencja | Electron Technology Conference 2013 |
| Czasopismo/seria | Proceedings of SPIE / The International Society for Optical Engineering |
Abstract
Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional structures due to their low power consumption, fast and stable time response, small dimensions and possibility of embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type gas sensors based on ZnO and WO3 nanostructures. ZnO:Al nanorods with good cristallinity were obtained with electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method. The sensors were built as a nanowire network. WO3 films with nanocrystalline surface were manufactured by deposition of a three layer WO3/W/WO3 structure by RF sputtering and successive annealing of the structure in appropriate temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional conductometric type sensors.
