Szczegóły publikacji
Opis bibliograficzny
Mid-infrared reflectance modulator based on a graphene CMOS-compatible metasurface / Fei Han, Kacper PILARCZYK, Zaoyang Lin, Conglin Sun, Guy A. E. Vandenbosch, Joris Van de Vondel, Pol Van Dorpe, Xuezhi Zheng, Niels Verellen, Ewald Janssens // Laser & Photonics Reviews [Dokument elektroniczny]. — Czasopismo elektroniczne ; ISSN 1863-8899. — 2025 — vol. 19 iss. 13 art. no. 2402258, s. 1–12. — Wymagania systemowe: Adobe Reader. — Bibliogr. s. 11–12, Abstr. — Publikacja dostępna online od: 2025-03-29. — K. Pilarczyk - dod. afiliacja: KU Leuven, Belgium
Autorzy (10)
- Han Fei
- AGHPilarczyk Kacper
- Lin Zaoyang
- Sun Conglin
- Vandenbosch Guy A. E.
- van de Vondel Joris
- Van Dorpe Pol
- Zheng Xuezhi
- Verellen Niels
- Janssens Ewald
Słowa kluczowe
Dane bibliometryczne
| ID BaDAP | 162039 |
|---|---|
| Data dodania do BaDAP | 2025-09-05 |
| Tekst źródłowy | URL |
| DOI | 10.1002/lpor.202402258 |
| Rok publikacji | 2025 |
| Typ publikacji | artykuł w czasopiśmie |
| Otwarty dostęp | |
| Czasopismo/seria | Laser & Photonics Reviews |
Abstract
Optical modulators based on tunable graphene-metal hybrid metasurfaces have emerged as promising optoelectronic devices due to their high speed and efficient modulation that is controllable through electrostatic gating. In particular, optical modulation in the mid-infrared region has attracted considerable interest for applications in biosensing, imaging, communication, and computing. However, the scalability of metasurfaces poses a challenge as typical fabrication pathways are not compatible with complementary metal-oxide-semiconductor (CMOS) technology. In this work, a tunable graphene-metasurface absorber is presented that integrates a metal-dielectric-metal optical cavity with a graphene layer. Stable performance in ambient conditions is achieved by the incorporation of an ultrathin Al₂O₃ capping layer. This barrier layer prevents direct contact between the metallic antennas and the graphene layer, which results in a large on/off ratio. For a gold metasurface, the creation of an optical cavity strongly enhances the modulation depth of the reflectance between 7 µm to 8 µm from 11% to 47%. By replacing gold with aluminum, a cost-effective material employed in foundry processes, a comparable maximum modulation depth of 49% is obtained. These results open a new pathway for the integration of tunable graphene–metal hybrid metasurfaces with CMOS-compatible technologies, facilitating a scalable production of mid-infrared modulators.