Szczegóły publikacji
Opis bibliograficzny
$NO_{2}$ detection via microwave-based gas sensor with $SnO_{2}$ deposited by ALD / Dominik GROCHALA, Stanisław KARCZ, Anna PALECZEK, Łukasz BŁAJSZCZAK, Mateusz KOCOŃ, Konstanty MARSZAŁEK, Selina Kern, Ryan W. Crisp, Kamil STASZEK, Artur RYDOSZ // W: GeMiC 2025 [Dokument elektroniczny] : 2025 16th German Microwave Conference : March 17–19, 2025, Dresden, Germany. — Wersja do Windows. — Dane tekstowe. — [Piscataway] : IEEE, 2025. — (German Microwave Conference ; ISSN 2167-8022). — Dod. ISBN: 979-8-3315-2179-0. — e-ISBN: 978-3-9820397-4-9. — S. 242–245. — Wymagania systemowe: Adobe Reader. — Bibliogr. s. 245, Abstr. — Publikacja dostępna online od: 2025-05-13. — D. Grochala, K. Marszałek - dod. afiliacja: Advanced Diagnostic Equipment sp. z o. o., Poland
Autorzy (10)
Słowa kluczowe
Dane bibliometryczne
| ID BaDAP | 160087 |
|---|---|
| Data dodania do BaDAP | 2025-06-24 |
| Tekst źródłowy | URL |
| DOI | 10.23919/GeMiC64734.2025.10979063 |
| Rok publikacji | 2025 |
| Typ publikacji | materiały konferencyjne (aut.) |
| Otwarty dostęp |  |
| Wydawca | Institute of Electrical and Electronics Engineers (IEEE) |
| Czasopismo/seria | German Microwave Conference |
Abstract
In this paper, the gas-sensing characteristics of the tin dioxide (SnO2) gas-sensitive layer, deposited by atomic layer deposition (ALD), in the microwave frequency range are presented and discussed. The microwave-based gas sensor was previously designed in the form of a meander-type transmission line working at 5.8 GHz with an eight-port reflectometer part and tested with several MOX films. At the same time, ALD has not been reported yet in microwave-based gas-sensing applications. The sensor was tested in the 0-10 ppm range of nitrogen dioxide at various relative humidity (RH) and operating temperatures (OT). The measured limit of detection (LOD) was as low as 0.05 ppm while the estimated LOD could reach 0.005 ppm. The obtained results can be used to further optimize the microwave-based sensing elements for various applications including gas sensors where high relative humidity levels are expected to exist.
