Szczegóły publikacji
Opis bibliograficzny
Finite element analysis of magnetic shielding for a miniaturized MEMS displacement sensor / Nitin Vijay Satpute, Prakash Dhoka, Swapnil Arawade, Siddharth Jabade, Marek IWANIEC, Ramesh NARINA, Nikhil Mohan Shinde // W: MEMSTECH 2022 [Dokument elektroniczny] : IEEE XVIIIth international conference on the Perspective technologies and methods in MEMS desing : Polyana, Ukraine, 7–11 September 2022 : proceedings / Lviv Polytechnic National University ; IEEE Ukraine Section. — Wersja do Windows. — Dane tekstowe. — Lviv : IEEE, cop. 2022. — e-ISBN: 979-8-3503-9680-5. — S. 20–24. — Wymagania systemowe: Adobe Reader. — Bibliogr. s. 24, Abstr. — Publikacja dostępna online od: 2023-01-04. — S. Arawade - afiliacja: Industrial Metal Powder Pvt. Ltd, Pune, India
Autorzy (7)
- Satpute Nitin Vijay
- Dhoka Prakash
- Arawade Swapnil
- Jabade Siddharth
- AGHIwaniec Marek
- AGHNarina Ramesh
- Shinde Nikhil Mohan
Słowa kluczowe
Dane bibliometryczne
| ID BaDAP | 144552 |
|---|---|
| Data dodania do BaDAP | 2023-01-23 |
| Tekst źródłowy | URL |
| DOI | 10.1109/MEMSTECH55132.2022.10002932 |
| Rok publikacji | 2022 |
| Typ publikacji | materiały konferencyjne (aut.) |
| Otwarty dostęp |  |
| Wydawca | Institute of Electrical and Electronics Engineers (IEEE) |
Abstract
Miniaturized inductive sensors have measurement range of few millimeters and are used for accuracy within few micrometers. It is very crucial to maintain the accuracy of these sensors by magnetic shielding since their accuracy is influenced by presence of external magnetic field. In this paper study of magnetic shielding of a MEMS minimalized Linear Variable Differential Transformer (LVDT) has been presented, where pure iron has been used as the shieling material. The finite element analysis has been performed to investigate influence of external magnetic field of a permanent magnet on output voltage of the sensor. It has been demonstrated that incorporation of 300 μm thick pure iron shield spaced at distance of 5.0 mm from the sensor, ensures significant attenuation of error introduced due to presence of external magnetic field near the sensor.
